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LD Nozzle Monitoring System


  • During DEV processing, process accidents due to defective LD nozzle height and level.


  • 1) Maintaining reproducibility of the gap between LD nozzle and wafer during LD Nozzle processing.
  • 2) Detection and management of tilting of LD Nozzle and FDC data for LD Nozzle.

System Composition

<When the LD height is normal>

<When the LD height is defective>


Business Registration Number: 129-81-59631

Address: Samhwan Hipex B Building 518-4, 230, Pangyoyeok-ro, Bundang-gu, Seongnam-si, Gyeonggi-do

Hong soon-suk, CEO of SEMICON TECH GLOBAL Co., Ltd.

Kim su-hee, Information Management Officer