LD Nozzle Monitoring System
Background
- During DEV processing, process accidents due to defective LD nozzle height and level.
Purpose
- 1) Maintaining reproducibility of the gap between LD nozzle and wafer during LD Nozzle processing.
- 2) Detection and management of tilting of LD Nozzle and FDC data for LD Nozzle.
System Composition
<When the LD height is normal>
<When the LD height is defective>
Diagram
