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Exhaust Monitoring System

Accidents from Exhaust can be prevented beforehand, and the Data can be managed using the FDC.
The PM cycle can be managed, and engineer losses can be decreased by supervising the Trends.

  • The Exhaust can be monitored real-time and be connected to the FDC.
  • Manufacturing process accidents can be prevented depending on the Exhaust ascent / descent.
  • Any Process Errors that occur can be checked with the FDC.
  • The Exhaust ascent / descent Trend and Line’s pollution status can be checked. (PM cycle management)



Size 30mm x 35mm x 30mm
Weight 35g
Power 12 ~ 24 V DC
Fluid Air, N2
Pressure Range 50Pa, 100Pa, 500Pa
Operating Temperature -10℃ ~ +50℃
Operating Humidity 35% ~ 85%


Description Before After
FDC Interlock X O
FDC Trend Management X O
PM Cycle Management X O
Accident Prevention X O

Business Registration Number: 129-81-59631

Address: Samhwan Hipex B Building 518-4, 230, Pangyoyeok-ro, Bundang-gu, Seongnam-si, Gyeonggi-do

Hong soon-suk, CEO of SEMICON TECH GLOBAL Co., Ltd.

Kim su-hee, Information Management Officer